{"?xml":{"@version":"1.0"},"edm:RDF":{"@xmlns:dc":"http://purl.org/dc/elements/1.1/","@xmlns:edm":"http://www.europeana.eu/schemas/edm/","@xmlns:wgs84_pos":"http://www.w3.org/2003/01/geo/wgs84_pos","@xmlns:foaf":"http://xmlns.com/foaf/0.1/","@xmlns:rdaGr2":"http://rdvocab.info/ElementsGr2","@xmlns:oai":"http://www.openarchives.org/OAI/2.0/","@xmlns:owl":"http://www.w3.org/2002/07/owl#","@xmlns:rdf":"http://www.w3.org/1999/02/22-rdf-syntax-ns#","@xmlns:ore":"http://www.openarchives.org/ore/terms/","@xmlns:skos":"http://www.w3.org/2004/02/skos/core#","@xmlns:dcterms":"http://purl.org/dc/terms/","edm:WebResource":[{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-RB1PYV24/81cabf09-d2ed-4789-bd59-3c8b74903022/HTML","dcterms:extent":"13 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-RB1PYV24/4d1b15fa-60a5-4dd7-a69b-43f328980c2b/PDF","dcterms:extent":"524 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-RB1PYV24/8e0d4ddf-0c2f-4b59-918a-4b41b2fb77cf/TEXT","dcterms:extent":"12 KB"}],"edm:TimeSpan":{"@rdf:about":"1992-1999","edm:begin":{"@xml:lang":"en","#text":"1992"},"edm:end":{"@xml:lang":"en","#text":"1999"}},"edm:ProvidedCHO":{"@rdf:about":"URN:NBN:SI:DOC-RB1PYV24","edm:isNextInSequence":{"@rdf:resource":"https://www.dlib.si/details/URN:NBN:SI:doc-K3GMYIPF"},"dcterms:isPartOf":[{"@rdf:resource":"https://www.dlib.si/details/URN:NBN:SI:spr-QKUCN2BD"},{"@xml:lang":"sl","#text":"Kovine zlitine tehnologije"}],"dcterms:issued":"1995","dc:creator":["Cvelbar, Andrej","Godec, Matjaž","Navinšek, Boris","Panjan, Peter","Zalar, Anton"],"dc:format":[{"@xml:lang":"sl","#text":"številka:1/2"},{"@xml:lang":"sl","#text":"letnik:29"},{"@xml:lang":"sl","#text":"4 strani"},{"@xml:lang":"sl","#text":"str. 315-318"}],"dc:identifier":["ISSN:1318-0010","COBISSID:17108741","URN:URN:NBN:SI:doc-RB1PYV24"],"dc:language":"sl","dc:publisher":[{"@xml:lang":"sl","#text":"Inštitut za kovinske materiale in tehnologije"},{"@xml:lang":"sl","#text":"Železarna Jesenice"},{"@xml:lang":"sl","#text":"Železarna Ravne"},{"@xml:lang":"sl","#text":"Železarna Štore"}],"dc:subject":[{"@xml:lang":"sl","#text":"mikroelektronika"},{"@xml:lang":"sl","#text":"silicidi"},{"@xml:lang":"sl","#text":"večlpastne strukture"},{"@rdf:resource":"http://www.wikidata.org/entity/Q6850204"}],"dcterms:temporal":{"@rdf:resource":"1992-1999"},"dc:title":{"@xml:lang":"sl","#text":"Študij rasti titanovega silicida|"},"dc:description":[{"@xml:lang":"sl","#text":"The silicides have been a topic of intensive research last ten years due to their frequent applications in integrated circuits. Among them, ?$TiSi_2$? with low resistivity, high stability and self-aligning properties, seems to be the most important. The models to predict first phase and subsequent sequence of phase formation in Si-Ti system are presented. A study of titanium silicide growth in a case of multilayer structure is shown. The silicide phase formation was monitored by in-situ resistivity measurements, cross-sectional transmission electron microscopy (XTEM), Auger electron spectroscopy (AES) depth profiling and the X-ray diffraction technique"},{"@xml:lang":"sl","#text":"Silicidi so zadnjih deset let tema intenzivnih raziskav, predvsem zaradi vse pogostejše uporabe v integriranih vezjih. Med njimi je najpomembnejši ?$TiSi_2$? zaradi nizke električne upornosti, velike stabilnosti in kompatibilnosti s procesom izdelave integriranih vezij. Predstavljeni so modeli napovedovanja nastanka prve faze oziroma zaporedja nastanka faz pri pregrevanju Si-Ti sistema. Na primeru večplastne strukture je prikazan študij rasti titanovega silicida. Nastanek posameznih silicidnih faz smo zasledovali z in-situ meritvijo upornosti, s presevno elektronsko mikroskopijo prerezov (XTEM), z rentgensko difraktografijo in z Augerjevo profilno analizo"}],"edm:type":"TEXT","dc:type":[{"@xml:lang":"sl","#text":"znanstveno časopisje"},{"@xml:lang":"en","#text":"journals"},{"@rdf:resource":"http://www.wikidata.org/entity/Q361785"}]},"ore:Aggregation":{"@rdf:about":"http://www.dlib.si/?URN=URN:NBN:SI:DOC-RB1PYV24","edm:aggregatedCHO":{"@rdf:resource":"URN:NBN:SI:DOC-RB1PYV24"},"edm:isShownBy":{"@rdf:resource":"http://www.dlib.si/stream/URN:NBN:SI:DOC-RB1PYV24/4d1b15fa-60a5-4dd7-a69b-43f328980c2b/PDF"},"edm:rights":{"@rdf:resource":"http://rightsstatements.org/vocab/InC/1.0/"},"edm:provider":"Slovenian National E-content Aggregator","edm:intermediateProvider":{"@xml:lang":"en","#text":"National and University Library of Slovenia"},"edm:dataProvider":{"@xml:lang":"sl","#text":"Inštitut za kovinske materiale in tehnologije"},"edm:object":{"@rdf:resource":"http://www.dlib.si/streamdb/URN:NBN:SI:DOC-RB1PYV24/maxi/edm"},"edm:isShownAt":{"@rdf:resource":"http://www.dlib.si/details/URN:NBN:SI:DOC-RB1PYV24"}}}}