Boron-doped hydrogenated amorphous semiconductor MEMS - Galindo, Margarita (Materiali in tehnologije, 2015)
Keywords: micromachining technology; tanke plasti; mikroelektromehanski sistemi; micro-electro-mechanical systems; Vernier beam; Vernierjev steber; diamantna struktura; diamond-type structure; amorfni silicij; amorphous silicon; PECVD; amorfni silicij-germanij